Day 1 :
President/CTO, Applied Research & Photonics, Inc., USA
Dr. Anis Rahman is an acclaimed scientist for metrology. He is a winner of many scientific awards including NASA Nanotech Brief’s “Nano-50” award twice; CLEO/Laser Focus World’s “Innovation award;” and “2015 MP Corrosion Innovation of the Year,” by the NACE. HE is the Founder of Applied Research & Photonics (ARP), a leading terahertz metrology company located in Harrisburg, PA (see http://arphotonics.net). His invention of “Dendrimer Dipole Excitation,” a new mechanism for terahertz generation, makes it possible to generate high power terahertz radiation. With sub-nanometer resolution, terahertz metrology offers tremendous savings in time and cost for semiconductor process development.
Full Professor, University of South Florida, USA Director of RF MEMS Transducers Group
Jing Wang is a Full Professor in Department of Electrical Engineering at the University of South Florida, which he joined since 2006. He got dual B.S. degrees in Electrical Engineering and Mechanical Engineering from Tsinghua University in 1999. He received two M.S. degrees, one in electrical engineering, the other in mechanical engineering, and a Ph.D. degree from University of Michigan in 2000, 2002, 2006, respectively. His research interests include micromachined transducers, RF/Bio-MEMS, lab-on-a-chip and microfluidics, functional nanomaterials, nanomanufacturing, and RF/microwave devices. His work has been funded for more than $10M by research grants from federal agencies (NSF, DTRA, US Army, US Air Force, etc.) and contracts from more than a dozen companies. He has published more than 120 peer-reviewed papers and held 10 US patents. He serves as the chairperson for IEEE MTT/AP/EDS Florida West Coast Section and Director for the Wireless and Microwave Information (WAMI) Center. He has been elected as a member of the prestigious IEEE MTT-Technical Coordinating Committee on RF MEMS. He has chaired IEEE Wireless and Microwave Technology Conference (WAMICON) in the last a few years.
This talk is going to present our recent efforts towards strategic design, advanced manufacturing, and characterization of miniaturized devices for emerging RF/MW/Biomedical microsystems.
Firstly, this talk will discuss design, fabrication and testing of high-frequency selectivity (high-Q) on-chip micro-resonators for wireless telemetry and sensor applications. The most recent progress in the area of high-Q micromechanical resonators will be presented, which outperform the current state-of-the-art QCM, SAW and BAW devices, thus enabling the next generation point-of-care and/or disposable biosensor applications. This talk will also review our ongoing efforts for implementation of chip-scale acoustic/optical sensing platforms by taking advantages of optical and acoustic resonances. The ability to integrate an array of miniaturized capacitive/piezoelectric micromachined ultrasonic transducers offers unique performance benefits thus enabling continuous monitoring or imaging.
Secondly, this talk will discuss the fabrication and characterization of surface-attached microbeam arrays of that are made of a thermoresponsive polymer with embedded spherical or octopod Fe3O4 nanoparticles. Turning on and off an AC-magnetic field induces the microbeam array to expel or imbibe water due to the hydrophilic-to-hydrophobic transition, leading to a reversible transition from a buckled to non-buckled state. It is shown that the octopod nanoparticles have a heating rate 30% greater (specific absorption rate) than that of the spherical nanoparticles, which shortens the response time of the polymer MEMS micro-actuators. It is further demonstrated that this shape transition can be used to propel 50μm spherical objects along a surface. It holds promise of harnessing shape-shifting patterns in microfluidics for manipulation biological samples, which is crucial for microbiology, pharmaceutical science, and related bioengineering fields.